Phase control system is a power converter device for precise control on temperature of electric furnace used in semiconductor material field. The system realizes the driving sequence optimized for power control precision, reliability in continuous operation, and process recipe for semiconductor field. The product is proven for performance and reliability after commercial operation in domestic field and overseas field where quality of power system is relatively unstable.
The system can be utilized in various fields such as electric furnace and voltage/high-current power control.
(50V, 2,000A, 2ch)
01. Phase Control System
Phase control system is a power converter device for precise control on temperature of electric furnace used in semiconductor material field. The system realizes the driving sequence optimized for power control precision, reliability in continuous operation, and process recipe for semiconductor field. The product is proven for performance and reliability after commercial operation in domestic field and overseas field where quality of power system is relatively unstable.
The system can be utilized in various fields such as electric furnace and voltage/high-current power control.
(50V, 2,000A, 2ch)
02. Power Supply Device for Semiconductor Equipment
The multi-channel power conversion device is applicable on various processes including cleaning process among semiconductor’s production processes. The 36-channel power supply device in 500W level is independently controlled precisely and it completed control property and process evaluation by using in production line of various manufacturing companies.
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